Chemical Vapor Deposition & Infiltration

Chemical Vapor Deposition (CVD) and Infiltration (CVI)

TevTech provides custom tailored chemical vapor deposition and infiltration systems to the advanced materials industry.  Our team combines a unique combination of design and operation experience with a variety of materials applications. This experience provides our staff with an understanding of the challenges and allows for effective solutions, enabling capacity increase, expansion of size capability, and often reduction of operating costs.  If your production team is looking for an increase production volume or ways to reduce current operating costs we can help develop a solution.

TevTech’s turnkey chemical vapor deposition systems exceed our customer’s requirements through design, high quality components, and precise manufacturing.  Our engineering team is expert in the operation of these systems. As a result we can provide revolutionary designs that work well in the production environment. Our vapor delivery systems and engineered hot zones are designed for your manufacturing team’s ease of setup and maintenance. All of TevTech’s design solutions are characterized by exceptional control, and durability.  

The TevTech team has designed and delivered CVD systems with a wide range of physical characteristics and operating parameter ranges.

CVD System
Typical Specification

Depostion Area

Laboratory to 64” Diameter to 80” High – Single or multiple deposition arrangements (material specific)

Temperature Range

Up to 1950 C (depending upon materials)

Pressure Range

1 to 760 Torr

Furnace Type

Cold Wall, Stainless Steel, Water Jacket

Furnace Configuration

Horizontal or Vertical with loading mechanism

Hot Zone Material

Graphite with Carbon Felt Thermal Insulation

Power Supply

Low Voltage Proportional Reactor

Gas Delivery

Solid, Liquid, and/or Gas

Process Control

PLC with touchscreen operator interface

CVD Applications Specific   
TevTech’s CVD furnaces can process a variety of materials including:

CVD Coatings CVD Bulk Material Infiltration

Silicon Carbide

Silicon Carbide
bulk material

Silicon Carbide

Pyrolytic Boron Nitride (PBN)

Optical Materials:
Zinc Sulfide (ZnS)
Zinc Selenide (ZnSe)


Pyrolytic Carbon

Pyrolytic Boron Nitride
PBN - Net Shape


CVD & CVI Links

TevTech’s chemical vapor deposition (CVD) high temperature vacuum furnaces process a variety of materials including:

Expert Information

Click on a “applications” link for examples of chemical vapor deposition CVD high temperature vacuum furnace systems.  We invite you to discuss your requirements.

To contact TevTech LLC about your chemical vapor deposition CVD processing needs call 978-667-4557
or click here to contact us.


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