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Chemical Vapor Deposition (CVD)

TevTech supplies custom chemical vapor deposition (CVD) high temperature vacuum furnace manufacturing systems to the advanced materials industry.  Our engineers are uniquely qualified to partner with industry to provide CVD high temperature vacuum furnace systems that improve quality and yield and reduce operating costs. 

Systems

TevTech’s chemical vapor deposition high temperature vacuum furnace systems are designed to exceed our customer’s requirements through expert design, high quality components, and precision manufacturing.  Our engineers are experts in the design and operation of CVD high temperature vacuum furnace system components and have provided revolutionary designs for vapor delivery systems and hot zones characterized by exceptional control, stability, and longevity.  We design and build CVD high temperature vacuum furnace systems with a wide range of physical characteristics and operating parameter ranges.


Hot Zone Dimensions

12” Diameter by 12” High to 60” Diameter to 60” High

Temperature Range

Up to 2300 C

Pressure Range

1 to 760 Torr

Furnace Type

Cold Wall, Stainless Steel, Water Jacket

Furnace Configuration

Horizontal or Vertical with loading mechanism

Hot Zone Material

Graphite with Carbon Felt Thermal Insulation

Power Supply

Low Voltage Proportional Reactor

Raw Material States

Solid, Liquid, and/or Gas

Process Control

PLC with operator interface


Applications

TevTech’s chemical vapor deposition CVD high temperature vacuum furnace systems manufacture a variety of materials including:

More Information
Please visit our applications section for examples of chemical vapor deposition CVD high temperature vacuum furnace systems.  We invite you to review these data and to contact us (link to contact us) about your chemical vapor deposition CVD processing needs.
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